SJV Associates Evaporation, Sputtering, Plasma Etchers & Turbo Pump Carts - Large Production, Batch and R & D Systems
SJV Associates current inventory includes Filament Evaporation Systems, Electron Beam Systems and Production Sputtering Systems. We have manufactured systems from Airco, Applied Materials, Balzers, CHA, CPA, CVC, D & W, Edwards, Leybold Heraeus, MRC, Perkin Elmer, Sloan, Temescal, Varian, Veeco and many others.
February 2012
The Following Systems Are In Stock:
·
CPA 9900 Inline 12" x 12" Sputtering System
(Currently in production)
CPA 9900 Inline System includes:
- Entry & Exit Load Lock Chambers
- Three cathode positions with two (2) cathodes installed in the process
chamber and one (1) cathode installed in the heating chamber
- Targets: Aluminum, Nickel & Titanium installed
- Advanced Energy MDX-10 10 KW DC power supply
- Plasmatherm 2Kw RF Etch
- Two (2) Gas Mass Flow Controllers (MFC's)
- Residual Gas Analizer (RGA) installed
- Turbo pumped system with Alcatel 2033 roughing pump
- CPA system maintains 10-7 Torr
- Full set of manuals and schematics
______________________________________________________
EVAPORATORS: GOLD FILAMENT EVAPORATOR
______________________________________________________
LEYBOLD TOPS TURBO PUMP CART
Leybold Turbo Pumping Station
LEYBOLD TOPS 6" Turbo pump cart with TMP 151 Turbo pump, NT 151 controller, Vacuum gauge controller, on off switches and controls, Leybold
D8 Direct drive mechanical pump.
HELIUM LEAK DETECTOR:
VARIAN
Varian 936-61
Auto Leak Detector with audio, diffusion pump, LN2 Trap, roughing and backing pumps, internal calibrated leak, air compressor in a
portable cart.
PLASMA ETCHERS
Applied Materials 8110 / 8115 5" Wafer Plasma Etcher
Applied Materials 8100 / 8115 system with 5 inch wafer carrier, 25 x 25
SS water cooled bell jar, power hoist, with updated electronics with
PLC controller, 2 KW RF power supply, Multi MFC gas inlet &
pressure controller, heat & cool exchanger pump assembly, Leybold
TMP 1000 L/S turbo pump, D60 mechanical pump.
